›Dipl.-Ing. Production Technology from the Technical University of Munich and PhD from Technical University of Stuttgart
›Over 30 years in the semiconductor industry
›Leadership roles in Production, Engineering and Factory Automation at Advanced Micro Devices and Globalfoundries
›200/300mm waferfab startups
›Since 2014 at Infineon Technologies AG, currently Senior VP Corporate Supply Chain - Factory Integration, responsible for the factory control systems in Waferfab, Assembly and Test facilities globally
The SEMI industry standards for wafer fabs are developed to a very mature state 1. Automation standards allow plug+play automation of all production scenarios including fully automated material handling and transportation. Automation also ensures a high amount of consistent data about all material movements (traceability !) and action taken. 2. The Interface-A standard ensures high speed collection of a vast amount of parameters and sensor values form equipment and processes 3. All the data collected from 1 and 2 can be processes with modern big data tools and infrastructures to derive information, conclusions and predictions. Many of the standards apply to Backend manufacturing as well. Those where Backend is not directly included in the scope of the standards also benefit greatly, e.g. the 300mm automation scenarios are perfectly suited to support higher automated production in backend also. Most of the existing standards apply in the same way to the equipment used for SiC and GaN based semiconductor manufacturing (the question of physical material handling will be excluded from this presentation, the presentation focusses on the topics around controlling the factory). In essence the answer to the title “Industry4.0 in semiconductor factories – anything new coming for SiC and GaN?” is: No, nothing new. A good industry4.0 program is applicable to SiC and GaN the same way it applies to other semiconductor factories. The presentation will conclude with a request to continuously and strongly support the SEMI standards, because they are very useful across waferfabs and backend manufacturing.